aluminium coated CCD
Jean-Marc Defise
jmdefise at ulg.ac.be
Thu Feb 4 19:18:33 CLST 1999
Posted to CCD-world:
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This is nice to learn that this already exists and works.
Is it a backside thinned chip with an additionnal Al layer on it?
Typical Al thicknesses are 100 nm.
Why do you use an intermediate MgF2 layer? What thickness?
Concerning the chip to test, our test facilities are not available for a
while. But I take note of your experience in this field.
Thank you for your support,
Best regards,
Jean Marc Defise
Posted to CCD-world:
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Jean Marc
(cc: to ccd-world, for information)
EEV have made CCDs with Al on the backside. These were for the space RGS
x-ray instrument. The Al layer served a similar purpose (ie blocked longer
wavelengths).
They worked fine.
Would you like a sample chip to test (no promises, but I could look)?
Do you know what thickness you need for the EUV application?
Would a thin intermediate layer of MgF2 be OK?
Cheers,
Paul
_______________________________________________________________
Dr Paul Jorden, CCD Applications, EEV
Waterhouse Lane, Chelmsford, Essex, CM1 2QU, UK
Tel: 44 (0) 1245 -453458 (direct), -493493 (switchboard)
Fax: 44 (0) 1245 453224
see also:- http://www.ccd.eev.com/
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