aluminium coated CCD

Paul.Jorden at eev.com Paul.Jorden at eev.com
Thu Feb 4 15:21:09 CLST 1999


Posted to CCD-world:
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Hi

 > Does anyone know about aluminium coated backside thinned CCD for EUV
 > applications?
 > Are there specific reasons that prevent manufacturers to work on this 
topic?
 > (what about the interface Al-Si?)
>
Would you like to elaborate a bit?
It sounds like you are looking to use Al as a backside gate to allow 
efficient charge collection on the backside (because it is fairly 
transparent in the EUV).  Is this right?
Give a few more details, and I'll enquire about it.
What wavelength region exactly is of interest?
I understand that Al penetrates undesirably into the Si at high 
temperatures; but this could be avoidable.

Regards,
Paul
_______________________________________________________________
Dr Paul Jorden,  CCD Applications, EEV
Waterhouse Lane, Chelmsford, Essex, CM1 2QU, UK
Tel:      44 (0) 1245 -453458 (direct), -493493 (switchboard)
Fax:      44 (0) 1245 453224
see also:-     http://www.ccd.eev.com/

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