aluminium coated CCD
Paul.Jorden at eev.com
Paul.Jorden at eev.com
Thu Feb 4 15:21:09 CLST 1999
Posted to CCD-world:
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Hi
> Does anyone know about aluminium coated backside thinned CCD for EUV
> applications?
> Are there specific reasons that prevent manufacturers to work on this
topic?
> (what about the interface Al-Si?)
>
Would you like to elaborate a bit?
It sounds like you are looking to use Al as a backside gate to allow
efficient charge collection on the backside (because it is fairly
transparent in the EUV). Is this right?
Give a few more details, and I'll enquire about it.
What wavelength region exactly is of interest?
I understand that Al penetrates undesirably into the Si at high
temperatures; but this could be avoidable.
Regards,
Paul
_______________________________________________________________
Dr Paul Jorden, CCD Applications, EEV
Waterhouse Lane, Chelmsford, Essex, CM1 2QU, UK
Tel: 44 (0) 1245 -453458 (direct), -493493 (switchboard)
Fax: 44 (0) 1245 453224
see also:- http://www.ccd.eev.com/
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